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572 pages • missing pub info (editions)
ISBN/UID: 9780521616065
Format: Paperback
Language: English
Publisher: Cambridge University Press
Publication date: 02 December 2004
Description
Modern technology depends on materials with precisely controlled properties. Ion beams are an excellent way to achieve controlled modification of surface and near-surface regions. In every integrated circuit production line, for example, there are...
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572 pages • missing pub info (editions)
ISBN/UID: 9780521616065
Format: Paperback
Language: English
Publisher: Cambridge University Press
Publication date: 02 December 2004
Description
Modern technology depends on materials with precisely controlled properties. Ion beams are an excellent way to achieve controlled modification of surface and near-surface regions. In every integrated circuit production line, for example, there are...