Science and Technology of Semiconductor Surface Preparation: Volume 477 by

Science and Technology of Semiconductor Surface Preparation: Volume 477

NATO Science Series II: Mathematics, Physics and Chemistry (Hardcover)

545 pages • missing pub info (editions)

nonfiction art technology medium-paced
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The focus of semiconductor wafer processing is rapidly changing. Pure device performance is no longer sufficient to ensure a technology's success as IC chips approach 1GB. Yield, reliability, cost and manufacturability are principal drivers of the...

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